- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/36 - Gas-filled discharge tubes for cleaning surfaces while plating with ions of materials introduced into the discharge, e.g. introduced by evaporation
Patent holdings for IPC class H01J 37/36
Total number of patents in this class: 28
10-year publication summary
|
1
|
4
|
2
|
6
|
2
|
3
|
2
|
3
|
1
|
1
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
5 |
| Axcelis Technologies, Inc. | 429 |
4 |
| Tokyo Electron Limited | 11599 |
2 |
| Lam Research Corporation | 4775 |
2 |
| Applied Materials, Inc. | 16587 |
1 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
1 |
| Lapis Semiconductor Co., Ltd. | 1004 |
1 |
| The Regents of the University of Michigan | 4409 |
1 |
| Carl Zeiss SMT GmbH | 2646 |
1 |
| Eagle Harbor Technologies, Inc. | 74 |
1 |
| Fundacion Tekniker | 59 |
1 |
| Gatan, Inc. | 111 |
1 |
| Hauzer Techno-coating B.V. | 9 |
1 |
| ION Beam Services | 33 |
1 |
| Nissin ION Equipment Co., Ltd. | 78 |
1 |
| Universidade Federal de Santa Catarina | 5 |
1 |
| Veeco Instruments Inc. | 332 |
1 |
| Shanghai IC R&D Center Co., Ltd | 181 |
1 |
| Changxin Memory Technologies, Inc. | 4732 |
1 |
| Other owners | 0 |